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Large-scale production and metrology of vertically aligned carbon nanotube films
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Image of FIG. 1.
FIG. 1.

(a) SEM image of VACNT film grown from iron catalyst film supported by a thermally oxidized Si substrate (growth conditions: Ar, , ); (b) 70° tilted sectional SEM image of VACNT film showing loosely packed vertically grown CNTs; (c) TEM image showing multiwalled CNTs of in diameters.

Image of FIG. 2.
FIG. 2.

(a) Optical macroimage of an as-grown VACNT film from catalytic multilayers supported by -coated Si substrate; (b) SEM image of a VACNT film with uniform thickness and dense packed CNTs; (c) TEM image of CNTs with diameters, and the inset showing high resolution TEM image of a CNT with clear sidewalls; (d) TEM image of nanoparticles embedded in nanotubes, where the inset shows that only was detected to be the catalytic metals in EDX.

Image of FIG. 3.
FIG. 3.

(a) Low-magnification TEM imaging used to measure the diameter distribution of CNTs; (b) distribution of diameters.

Image of FIG. 4.
FIG. 4.

TGA thermogram of the CNTs from VACNT film.

Image of FIG. 5.
FIG. 5.

Raman spectra excited from five spots on a typical VACNT film. The consistent and peak positions (1310 and ) and small variation of (1.39–1.42) indicate a high level of purity uniformity across the wafer.

Image of FIG. 6.
FIG. 6.

Thicknesses of CNT films grown with different flow rates.


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Techniques and properties investigated for development of the metrology standard for VACNT films.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Large-scale production and metrology of vertically aligned carbon nanotube films