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Large-scale production and metrology of vertically aligned carbon nanotube films
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10.1116/1.3148827
/content/avs/journal/jvsta/27/4/10.1116/1.3148827
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/4/10.1116/1.3148827

Figures

Image of FIG. 1.
FIG. 1.

(a) SEM image of VACNT film grown from iron catalyst film supported by a thermally oxidized Si substrate (growth conditions: Ar, , ); (b) 70° tilted sectional SEM image of VACNT film showing loosely packed vertically grown CNTs; (c) TEM image showing multiwalled CNTs of in diameters.

Image of FIG. 2.
FIG. 2.

(a) Optical macroimage of an as-grown VACNT film from catalytic multilayers supported by -coated Si substrate; (b) SEM image of a VACNT film with uniform thickness and dense packed CNTs; (c) TEM image of CNTs with diameters, and the inset showing high resolution TEM image of a CNT with clear sidewalls; (d) TEM image of nanoparticles embedded in nanotubes, where the inset shows that only was detected to be the catalytic metals in EDX.

Image of FIG. 3.
FIG. 3.

(a) Low-magnification TEM imaging used to measure the diameter distribution of CNTs; (b) distribution of diameters.

Image of FIG. 4.
FIG. 4.

TGA thermogram of the CNTs from VACNT film.

Image of FIG. 5.
FIG. 5.

Raman spectra excited from five spots on a typical VACNT film. The consistent and peak positions (1310 and ) and small variation of (1.39–1.42) indicate a high level of purity uniformity across the wafer.

Image of FIG. 6.
FIG. 6.

Thicknesses of CNT films grown with different flow rates.

Tables

Generic image for table
TABLE I.

Techniques and properties investigated for development of the metrology standard for VACNT films.

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/content/avs/journal/jvsta/27/4/10.1116/1.3148827
2009-06-30
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Large-scale production and metrology of vertically aligned carbon nanotube films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/4/10.1116/1.3148827
10.1116/1.3148827
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