Internal energy distribution change of sputtered Al atom under several hundreds of eV oxygen ion-beam bombardment by resonant laser ionization sputtered neutral mass spectroscopy
Normalized Al SNMS spectra vs laser excitation wavelength with changing the primary beam energies.
Primary energy dependences of Al to ratio taken by resonant laser ionization and useful yield of secondary .
XPS spectra for the craters sputtered by primary beam with an energy range from .
Peak intensity ratios of Al oxide to metal for the craters sputtered by primary beam with an energy range from .
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