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Internal energy distribution change of sputtered Al atom under several hundreds of eV oxygen ion-beam bombardment by resonant laser ionization sputtered neutral mass spectroscopy
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10.1116/1.3168560
/content/avs/journal/jvsta/27/5/10.1116/1.3168560
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/5/10.1116/1.3168560
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Normalized Al SNMS spectra vs laser excitation wavelength with changing the primary beam energies.

Image of FIG. 2.
FIG. 2.

Primary energy dependences of Al to ratio taken by resonant laser ionization and useful yield of secondary .

Image of FIG. 3.
FIG. 3.

XPS spectra for the craters sputtered by primary beam with an energy range from .

Image of FIG. 4.
FIG. 4.

Peak intensity ratios of Al oxide to metal for the craters sputtered by primary beam with an energy range from .

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/content/avs/journal/jvsta/27/5/10.1116/1.3168560
2009-07-31
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Internal energy distribution change of sputtered Al atom under several hundreds of eV oxygen ion-beam bombardment by resonant laser ionization sputtered neutral mass spectroscopy
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/5/10.1116/1.3168560
10.1116/1.3168560
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