1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Sputter deposition of Al-doped ZnO films with various incident angles
Rent:
Rent this article for
USD
10.1116/1.3186618
/content/avs/journal/jvsta/27/5/10.1116/1.3186618
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/5/10.1116/1.3186618
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Variation in deposition rate of the AZO films as a function of incident angles of the sputtered particles from 0° to 80°. The calculated deposition rate from the cosine law is also shown for comparison as a broken line.

Image of FIG. 2.
FIG. 2.

XRD profiles for AZO films as a function of incident angles of sputtered particles from 0° to 80°.

Image of FIG. 3.
FIG. 3.

(Color online) XRD pole figures of the (002) plane for AZO films with incident angles of the sputtered particles of (a) 0°, (b) 20°, (c) 40°, (d) 60°, and (e) 80°, respectively. The incident direction of the sputtered particles toward the substrate is designated by the star signs.

Image of FIG. 4.
FIG. 4.

Cross-sectional TEM micrographs of AZO films with incident angles of the sputtered particles of (a) 0°, (b) 20°, (c) 40°, (d) 60°, and (e) 80°, respectively. The arrows are designated as the direction of the incident sputtered particles.

Image of FIG. 5.
FIG. 5.

Cross-sectional SAED patterns of AZO films deposited with incident angles of sputtered particles of (a) 0°, (b) 20°, (c) 40°, (d) 60°, and (e) 80°, respectively.

Image of FIG. 6.
FIG. 6.

Cross-sectional TEM micrographs of (a) AZO films with the incident angle of the sputtered particles of 80°. NBD patterns of (b) the film/glass substrate interface, (c) middle area in the film, and (d) top of the film surface. Corresponding lattice images of (e) the film/glass substrate interface, (f) middle area in the film, and (g) top of the film surface.

Loading

Article metrics loading...

/content/avs/journal/jvsta/27/5/10.1116/1.3186618
2009-07-31
2014-04-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Sputter deposition of Al-doped ZnO films with various incident angles
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/5/10.1116/1.3186618
10.1116/1.3186618
SEARCH_EXPAND_ITEM