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Sputter deposition of Al-doped ZnO films with various incident angles
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10.1116/1.3186618
/content/avs/journal/jvsta/27/5/10.1116/1.3186618
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/5/10.1116/1.3186618
/content/avs/journal/jvsta/27/5/10.1116/1.3186618
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/content/avs/journal/jvsta/27/5/10.1116/1.3186618
2009-07-31
2014-11-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Sputter deposition of Al-doped ZnO films with various incident angles
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/5/10.1116/1.3186618
10.1116/1.3186618
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