1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Kinetic modeling of the effect of electron beam pulse duration on abatement of carbon tetrafluoride using as an additive gas
Rent:
Rent this article for
USD
10.1116/1.3224880
/content/avs/journal/jvsta/27/6/10.1116/1.3224880
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/6/10.1116/1.3224880

Figures

Image of FIG. 1.
FIG. 1.

(Color) Residual concentration of and removal efficiency after the reactions occur as a function of pulse duration for an input energy density of . Closed black circles show the result using the reaction rate coefficients given in Table II. Open plots show the results for three cases where evaluated rate coefficients of ion-molecule reaction are (blue square), (green diamond), and (red triangle), respectively. The green diamonds coincide with the black circles.

Image of FIG. 2.
FIG. 2.

(Color) Time evolution of the number density of (a) major components and (b) ions for a pulse duration of and an input energy density of . (a) Black, gray, red, blue, green, and yellow lines represent , , , , , and CO, respectively. Other radicals of , , CF, and COF are represented by dotted lines. (b) Black, red, blue, and green lines represent , , , and , respectively.

Image of FIG. 3.
FIG. 3.

(Color) Time evolution of the number density of (a) major components and (b) ions for a pulse duration of 100 ms and an input energy density of . Colors are the same in Fig. 2.

Image of FIG. 4.
FIG. 4.

(Color) Concentration (ppm) of , , , , and after the reaction of removal. The initial and concentrations are 1000 and 4000 ppm, respectively. The input energy densities are 0.85, 3, 4, and , which are required for abatement of 99% for pulse durations of , 10 ms, 100 ms, and 1 s.

Image of FIG. 5.
FIG. 5.

Input energy density required for abatement of 99% as a function of pulse duration.

Tables

Generic image for table
TABLE I.

Ion and radical reaction processes. and represent the ion and metastable atom of .

Generic image for table
TABLE II.

Reaction processes.

Loading

Article metrics loading...

/content/avs/journal/jvsta/27/6/10.1116/1.3224880
2009-09-14
2014-04-18
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Kinetic modeling of the effect of electron beam pulse duration on abatement of carbon tetrafluoride using O2 as an additive gas
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/6/10.1116/1.3224880
10.1116/1.3224880
SEARCH_EXPAND_ITEM