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Kinetic modeling of the effect of electron beam pulse duration on abatement of carbon tetrafluoride using as an additive gas
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10.1116/1.3224880
/content/avs/journal/jvsta/27/6/10.1116/1.3224880
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/6/10.1116/1.3224880
/content/avs/journal/jvsta/27/6/10.1116/1.3224880
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/content/avs/journal/jvsta/27/6/10.1116/1.3224880
2009-09-14
2014-07-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Kinetic modeling of the effect of electron beam pulse duration on abatement of carbon tetrafluoride using O2 as an additive gas
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/27/6/10.1116/1.3224880
10.1116/1.3224880
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