Kinetic modeling of the effect of electron beam pulse duration on abatement of carbon tetrafluoride using as an additive gas
(Color) Residual concentration of and removal efficiency after the reactions occur as a function of pulse duration for an input energy density of . Closed black circles show the result using the reaction rate coefficients given in Table II. Open plots show the results for three cases where evaluated rate coefficients of ion-molecule reaction are (blue square), (green diamond), and (red triangle), respectively. The green diamonds coincide with the black circles.
(Color) Time evolution of the number density of (a) major components and (b) ions for a pulse duration of and an input energy density of . (a) Black, gray, red, blue, green, and yellow lines represent , , , , , and CO, respectively. Other radicals of , , CF, and COF are represented by dotted lines. (b) Black, red, blue, and green lines represent , , , and , respectively.
(Color) Time evolution of the number density of (a) major components and (b) ions for a pulse duration of 100 ms and an input energy density of . Colors are the same in Fig. 2.
(Color) Concentration (ppm) of , , , , and after the reaction of removal. The initial and concentrations are 1000 and 4000 ppm, respectively. The input energy densities are 0.85, 3, 4, and , which are required for abatement of 99% for pulse durations of , 10 ms, 100 ms, and 1 s.
Input energy density required for abatement of 99% as a function of pulse duration.
Ion and radical reaction processes. and represent the ion and metastable atom of .
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