ITO and PR etch rates as well as negative dc bias as functions of the mixing ratio. The lines are to guide the eyes only.
Model-predicted densities of neutral species in pure HBr plasma (a) and the relative densities (mole fractions) of neutral species as functions of mixing ratio (b).
Fluxes of neutral species (, , and ) and the energy flux of positive ions as functions of the mixing ratio.
Experimental (ex) and model-predicted (m) electron temperature (in units of eV) and densities (in units of ) of charged species in plasma.
Ratios between the intensities in the plasma QMS spectrum.
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