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Effects of Al doping and annealing on chemical states and band diagram of gate stacks studied by photoemission and x-ray absorption spectroscopy
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10.1116/1.3259869
/content/avs/journal/jvsta/28/1/10.1116/1.3259869
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/28/1/10.1116/1.3259869
/content/avs/journal/jvsta/28/1/10.1116/1.3259869
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/content/avs/journal/jvsta/28/1/10.1116/1.3259869
2009-11-13
2014-12-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of Al doping and annealing on chemical states and band diagram of Y2O3∕Si gate stacks studied by photoemission and x-ray absorption spectroscopy
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/28/1/10.1116/1.3259869
10.1116/1.3259869
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