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Metal-organic chemical vapor deposition of aluminum oxide thin films via pyrolysis of dimethylaluminum isopropoxide
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10.1116/1.3294718
/content/avs/journal/jvsta/28/2/10.1116/1.3294718
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/28/2/10.1116/1.3294718
/content/avs/journal/jvsta/28/2/10.1116/1.3294718
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/content/avs/journal/jvsta/28/2/10.1116/1.3294718
2010-01-22
2014-11-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Metal-organic chemical vapor deposition of aluminum oxide thin films via pyrolysis of dimethylaluminum isopropoxide
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/28/2/10.1116/1.3294718
10.1116/1.3294718
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