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Surface-charging effect of capacitively coupled plasmas driven by combined dc/rf sources
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10.1116/1.3305537
/content/avs/journal/jvsta/28/2/10.1116/1.3305537
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/28/2/10.1116/1.3305537
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of the equivalent circuit. The surface of the dielectric located at and the surface potential is treated as one of the potential boundary conditions of Poisson’s equation.

Image of FIG. 2.
FIG. 2.

(Color online) Self-bias dc voltage and accumulated charge at the surface vs applied dc voltage amplitude.

Image of FIG. 3.
FIG. 3.

(Color online) Electron and ion charge and charge ratio flowing into the dielectric vs applied dc voltage amplitude.

Image of FIG. 4.
FIG. 4.

(Color online) Average plasma density over one rf period for different applied dc voltages.

Image of FIG. 5.
FIG. 5.

Average electron energy at the surface for different applied dc voltages over one rf period.

Image of FIG. 6.
FIG. 6.

(Color online) IEDs at the surface for different applied dc voltages.

Image of FIG. 7.
FIG. 7.

Self-bias dc voltage and accumulated charge at the surface vs thickness of the dielectric .

Image of FIG. 8.
FIG. 8.

(Color online) Average plasma density over one rf period for different thicknesses of the dielectric .

Image of FIG. 9.
FIG. 9.

(Color online) Electron and ion charge and their ratio flowing into the dielectric vs thickness of the dielectric .

Image of FIG. 10.
FIG. 10.

(Color online) IEDs at the surface for different thicknesses of the dielectric .

Image of FIG. 11.
FIG. 11.

Average electron energy at the surface for different thicknesses of the dielectric over one rf period .

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/content/avs/journal/jvsta/28/2/10.1116/1.3305537
2010-02-05
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface-charging effect of capacitively coupled plasmas driven by combined dc/rf sources
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/28/2/10.1116/1.3305537
10.1116/1.3305537
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