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Combinatorial characterization of transparent conductive properties of Ga-doped ZnO films cosputtered from electron cyclotron resonance and rf magnetron plasma sources
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10.1116/1.3328053
/content/avs/journal/jvsta/28/2/10.1116/1.3328053
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/28/2/10.1116/1.3328053
/content/avs/journal/jvsta/28/2/10.1116/1.3328053
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/content/avs/journal/jvsta/28/2/10.1116/1.3328053
2010-02-24
2014-09-15
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Combinatorial characterization of transparent conductive properties of Ga-doped ZnO films cosputtered from electron cyclotron resonance and rf magnetron plasma sources
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/28/2/10.1116/1.3328053
10.1116/1.3328053
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