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Atmospheric oxygen plasma activation of silicon (100) surfaces
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10.1116/1.3374738
/content/avs/journal/jvsta/28/3/10.1116/1.3374738
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/28/3/10.1116/1.3374738

Figures

Image of FIG. 1.
FIG. 1.

Plasma source schematic.

Image of FIG. 2.
FIG. 2.

Dependence of the water contact angle on the distance from the beam center after plasma exposure.

Image of FIG. 3.
FIG. 3.

Dependence of water contact angle on exposure time for varying plasma input powers and oxygen flow rates.

Image of FIG. 4.
FIG. 4.

Water contact angle measurements of Si (100) versus ambient exposure time [(●) IPA control, (▽) HF etched, (◼) , and (◇) ].

Image of FIG. 5.
FIG. 5.

Silicon x-ray photoemission spectra of Si (100) surfaces.

Image of FIG. 6.
FIG. 6.

Oxygen x-ray photoemission spectra of Si (100) surfaces.

Image of FIG. 7.
FIG. 7.

Carbon x-ray photoemission spectra of Si (100) surfaces.

Image of FIG. 8.
FIG. 8.

Predicted reactive species concentrations at 3 mm into the afterglow as a function of plasma density.

Image of FIG. 9.
FIG. 9.

Predicted reactive species concentrations at 3 mm into the afterglow as a function of oxygen feed concentration.

Image of FIG. 10.
FIG. 10.

Relationship between the experimental rate constant and the O atom concentration predicted from the model.

Tables

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TABLE I.

Reactions and rate constants for the helium and oxygen plasma.

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TABLE II.

Plasma model operating parameters.

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TABLE III.

Surface energy and water contact angle of Si (100) samples.

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TABLE IV.

Si photoemission peak area ratio and calculated oxide film thickness.

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TABLE V.

Surface atomic percentages from the O , C , Si , and F photoemission peaks.

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TABLE VI.

Summary of the surface activation kinetics.

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/content/avs/journal/jvsta/28/3/10.1116/1.3374738
2010-04-29
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Atmospheric oxygen plasma activation of silicon (100) surfaces
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/28/3/10.1116/1.3374738
10.1116/1.3374738
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