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Direct simulation Monte Carlo modeling of e-beam metal deposition
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10.1116/1.3386592
/content/avs/journal/jvsta/28/4/10.1116/1.3386592
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/28/4/10.1116/1.3386592

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Comparison of variation of viscosity as a function of temperature for two Lennard-Jones potential models and various VHS and HS models used in previous computational studies of atomic copper vapor.

Image of FIG. 2.
FIG. 2.

(Color online) Schematic of the setup used in the experiments and computational domain used in DSMC simulations.

Image of FIG. 3.
FIG. 3.

(Color online) Contours of number density on three slices of the three-dimensional flow field for a source temperature of 1860 K obtained from DSMC simulations using model 4.

Image of FIG. 4.
FIG. 4.

(Color online) Contours of dimensional and nondimensional mass fluxes on the collector plate for a slit source temperature of 1860 K obtained from DSMC simulations using two different molecular models. Top: model 4; bottom: model 2.

Image of FIG. 5.
FIG. 5.

Comparison of DSMC simulations and experiments for case 1. (△) model 1; (◇) model 2; (◻) model 3; (○) model 4; (▽) model 5; model 6; (solid line) measurements.

Image of FIG. 6.
FIG. 6.

Comparison of DSMC simulations and experiments for case 2. (△) model 1; (◇) model 2; (◻) model 3; (○) model 4; (▽) model 5; model 6; (solid line) measurements.

Image of FIG. 7.
FIG. 7.

Comparison of DSMC simulations and experiments for case 3. (△) model 1; (◇) model 2; (◻) model 3; (○) model 4; (▽) model 5; model 6; (solid line) measurements.

Image of FIG. 8.
FIG. 8.

Comparison of DSMC simulations and experiments for case 4. (△) model 1; (◇) model 2; (◻) model 3; (○) model 4; (V) model 5; model 6; (solid line) measurements.

Tables

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TABLE I.

Summary of molecular models used in DSMC simulations.

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TABLE II.

Summary of source conditions listed in Ref. 18.

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TABLE III.

Summary of source conditions used in DSMC simulations for case 1.

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TABLE IV.

Summary of source conditions used in DSMC simulations for case 2.

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TABLE V.

Summary of source conditions used in DSMC simulations for case 3.

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TABLE VI.

Summary of source conditions used in DSMC simulations for case 4.

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/content/avs/journal/jvsta/28/4/10.1116/1.3386592
2010-06-29
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Direct simulation Monte Carlo modeling of e-beam metal deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/28/4/10.1116/1.3386592
10.1116/1.3386592
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