(Color online) X-ray diffraction patterns for and films deposited at various deposition temperatures: (a) , (b) , (c) , (d) , and (e) .
(Color online) X-ray diffraction patterns for films (deposited with fixed oxygen flow rate at 4.0 SCCM) annealed at various temperatures: (a) 100, (b) 200, (c) 300, (d) 400, (e) 450, and (f) .
(Color online) Elemental contents vs various annealing temperatures of the films.
(Color online) Optical transmittance (a) and absorptance (b) of films deposited at various temperatures.
(Color online) vs for and films.
Preparation conditions for the samples used in this study.
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