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Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence
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10.1116/1.3478668
/content/avs/journal/jvsta/28/5/10.1116/1.3478668
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/28/5/10.1116/1.3478668
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Figures

Image of FIG. 1.
FIG. 1.

(Color online) Detection efficiency of the XRF experiment with both air and Be window attenuation and detector efficiency components. To demonstrate detectability over rows 4–7 of the Periodic Table, select emission energies are noted.

Image of FIG. 2.
FIG. 2.

(Color online) Low-energy portion of the XRF spectrum from the center position of sample A with fitted peaks (top). The Si peak from the substrate is detected but has low intensity considering its substantial thickness (see Fig. 1). Mo and Pb are detected from excitation of the detector shroud. The Zr and Y fitted areas are used for quantitative analysis, providing the composition profiles (middle) and thickness profiles (bottom) for the two samples.

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/content/avs/journal/jvsta/28/5/10.1116/1.3478668
2010-09-03
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/28/5/10.1116/1.3478668
10.1116/1.3478668
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