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Structure and properties of ZrN coatings deposited by high power impulse magnetron sputtering technology
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10.1116/1.3520640
/content/avs/journal/jvsta/29/1/10.1116/1.3520640
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/1/10.1116/1.3520640
/content/avs/journal/jvsta/29/1/10.1116/1.3520640
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/content/avs/journal/jvsta/29/1/10.1116/1.3520640
2011-01-03
2014-07-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structure and properties of ZrN coatings deposited by high power impulse magnetron sputtering technology
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/1/10.1116/1.3520640
10.1116/1.3520640
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