1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Structure and properties of ZrN coatings deposited by high power impulse magnetron sputtering technology
Rent:
Rent this article for
USD
10.1116/1.3520640
/content/avs/journal/jvsta/29/1/10.1116/1.3520640
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/1/10.1116/1.3520640

Figures

Image of FIG. 1.
FIG. 1.

Schematic representation of the deposition machine with the arrangements of the magnetrons and substrate table.

Image of FIG. 2.
FIG. 2.

(a) Cross-sectional BF TEM image of the coating-substrate interface of the coating. (b) back scattered electron-SEM image of the scratch test conducted on coated specimen.

Image of FIG. 3.
FIG. 3.

Bragg–Brentano XRD measurements recorded for the ZrN nitride coatings as a function of bias voltage.

Image of FIG. 4.
FIG. 4.

(a) BF image of the top of the coating deposited at . (b) Cross-sectional view of the whole coating with the selective area diffraction pattern of the coating in the inset.

Image of FIG. 5.
FIG. 5.

BF TEM images of the coatings deposited at (a) and (b) .

Image of FIG. 6.
FIG. 6.

(Color online) AFM images of the as-deposited ZrN coatings showing the topography.

Tables

Generic image for table
TABLE I.

Characterization results measured for the ZrN coatings deposited at three different substrate bias voltages.

Generic image for table
TABLE II.

Color measurements of the coatings recorded with a spectrophotometer.

Loading

Article metrics loading...

/content/avs/journal/jvsta/29/1/10.1116/1.3520640
2011-01-03
2014-04-24
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structure and properties of ZrN coatings deposited by high power impulse magnetron sputtering technology
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/1/10.1116/1.3520640
10.1116/1.3520640
SEARCH_EXPAND_ITEM