Schematic representation of the deposition machine with the arrangements of the magnetrons and substrate table.
(a) Cross-sectional BF TEM image of the coating-substrate interface of the coating. (b) back scattered electron-SEM image of the scratch test conducted on coated specimen.
Bragg–Brentano XRD measurements recorded for the ZrN nitride coatings as a function of bias voltage.
(a) BF image of the top of the coating deposited at . (b) Cross-sectional view of the whole coating with the selective area diffraction pattern of the coating in the inset.
BF TEM images of the coatings deposited at (a) and (b) .
(Color online) AFM images of the as-deposited ZrN coatings showing the topography.
Characterization results measured for the ZrN coatings deposited at three different substrate bias voltages.
Color measurements of the coatings recorded with a spectrophotometer.
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