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Highly textured growth of AlN films on sapphire by magnetron sputtering for high temperature surface acoustic wave applications
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10.1116/1.3551604
/content/avs/journal/jvsta/29/2/10.1116/1.3551604
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/2/10.1116/1.3551604
/content/avs/journal/jvsta/29/2/10.1116/1.3551604
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/content/avs/journal/jvsta/29/2/10.1116/1.3551604
2011-01-31
2014-11-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Highly textured growth of AlN films on sapphire by magnetron sputtering for high temperature surface acoustic wave applications
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/2/10.1116/1.3551604
10.1116/1.3551604
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