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Highly textured growth of AlN films on sapphire by magnetron sputtering for high temperature surface acoustic wave applications
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10.1116/1.3551604
/content/avs/journal/jvsta/29/2/10.1116/1.3551604
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/2/10.1116/1.3551604

Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) Wafer mapping of the FWHM rocking curve for the sample grown with 60% and . (b) -axis scan of the FWHM rocking curve mapping under 60% for different growth temperatures.

Image of FIG. 2.
FIG. 2.

(Color online) (a) Wafer mapping of the FWHM rocking curve for the sample grown at 100% and . (b) Typical rocking curve obtained at the edge area of the wafer.

Image of FIG. 3.
FIG. 3.

(Color online) -axis scan of the FWHM rocking curve mapping deposited at for different nitrogen concentrations in the gas mixture.

Image of FIG. 4.
FIG. 4.

XRD -scan of AlN (103) planes for the AlN film grown at and 100% .

Image of FIG. 5.
FIG. 5.

TEM image and SAED pattern for the AlN film grown at and 100% .

Image of FIG. 6.
FIG. 6.

(Color online) 3D AFM image for the AlN film grown at and 100% .

Image of FIG. 7.
FIG. 7.

(Color online) Rocking curves of the AlN/sapphire structures before and after annealing.

Image of FIG. 8.
FIG. 8.

(Color online) Refractive index dispersion curves of the AlN/sapphire structure before and after annealing.

Image of FIG. 9.
FIG. 9.

(Color online) Frequency responses before and after the annealing process of a SAW delay line fabricated on AlN/sapphire structure.

Tables

Generic image for table
TABLE I.

Experimental parameters related to both samples series.

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/content/avs/journal/jvsta/29/2/10.1116/1.3551604
2011-01-31
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Highly textured growth of AlN films on sapphire by magnetron sputtering for high temperature surface acoustic wave applications
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/2/10.1116/1.3551604
10.1116/1.3551604
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