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Electrical and microstructural properties of ion-implanted ZnO and ZnO:Ag thin films
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10.1116/1.3554836
/content/avs/journal/jvsta/29/3/10.1116/1.3554836
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/3/10.1116/1.3554836

Figures

Image of FIG. 1.
FIG. 1.

XRD patterns of (a) ZnO film deposited in the absence of oxygen at , (b) ZnO film deposited in the absence of oxygen at and implanted with ions at , and (c) SZO film deposited in the absence of oxygen at and implanted with ions at .

Image of FIG. 2.
FIG. 2.

(Color online) XRD patterns showing the ZnO (0002) peak for (a) ZnO film deposited in the absence of oxygen and implanted with ions at RT and at , (b) ZnO film deposited in 350 mTorr and implanted with ions at RT and at , (c) SZO film deposited in the absence of oxygen and implanted with ions at RT and at , and (d) SZO film deposited in 350 mTorr and implanted with ions at RT and at .

Image of FIG. 3.
FIG. 3.

SEM micrographs of ZnO films deposited in the absence of and in 350 mTorr before [(a) and (c),] and after [(b) and (d)] -ion implantation.

Image of FIG. 4.
FIG. 4.

Cross-sectional TEM images of ZnO films deposited in the absence of oxygen before (a) and after (b) -ion implantation at .

Image of FIG. 5.
FIG. 5.

Cross-sectional TEM images of ZnO films deposited in 350 mTorr before (a) and after (b) -ion implantation at .

Image of FIG. 6.
FIG. 6.

HRTEM images of -ion-implanted (at ) ZnO films deposited in the absence of oxygen [(a) and (c)] and in 350 mTorr [(b) and (d)].

Image of FIG. 7.
FIG. 7.

Cross-sectional TEM images of SZO films deposited in the absence of oxygen before (a) and after (b) -ion implantation at RT and followed by annealing at .

Tables

Generic image for table
TABLE I.

Electrical properties of the as-grown and implanted ZnO and SZO films.

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/content/avs/journal/jvsta/29/3/10.1116/1.3554836
2011-02-14
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electrical and microstructural properties of N+ ion-implanted ZnO and ZnO:Ag thin films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/3/10.1116/1.3554836
10.1116/1.3554836
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