1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Structure and properties of nanocrystalline thin films: Effect of the oxygen content and film thickness
Rent:
Rent this article for
USD
10.1116/1.3565487
/content/avs/journal/jvsta/29/3/10.1116/1.3565487
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/3/10.1116/1.3565487

Figures

Image of FIG. 1.
FIG. 1.

(Color online) AES compositional depth profiles of sample B4, which was deposited at the 3 SCCM oxygen flow rate for 56 min.

Image of FIG. 2.
FIG. 2.

(Color online) XRD patterns for the samples deposited at 0 (group A) and 3 SCCM (group B).

Image of FIG. 3.
FIG. 3.

(Color online) XRD patterns for the samples deposited at 5 (group C) and 8 SCCM (group D).

Image of FIG. 4.
FIG. 4.

(Color online) Electrical resistivity of the samples as a function of the thickness.

Image of FIG. 5.
FIG. 5.

(Color online) Electrical resistivity of the samples vs packing density.

Image of FIG. 6.
FIG. 6.

(Color online) Electrical resistivity of the samples as a function of the FWHM of ZrN (111).

Image of FIG. 7.
FIG. 7.

(Color online) Hardness of the samples as a function of the thickness.

Image of FIG. 8.
FIG. 8.

(Color online) Hardness of the thin films vs FWHM of the ZrN (111) peak.

Image of FIG. 9.
FIG. 9.

(Color online) Hardness of the thin films vs packing density.

Image of FIG. 10.
FIG. 10.

(Color online) Evolution of residual stress (compressive) vs the thickness in the thin films.

Tables

Generic image for table
TABLE I.

Deposition conditions for the thin films. flow rate: 17.5 SCCM.

Loading

Article metrics loading...

/content/avs/journal/jvsta/29/3/10.1116/1.3565487
2011-03-17
2014-04-23
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structure and properties of nanocrystalline ZrNxOy thin films: Effect of the oxygen content and film thickness
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/3/10.1116/1.3565487
10.1116/1.3565487
SEARCH_EXPAND_ITEM