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Ultraviolet photodetectors based on MgZnO thin films
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Image of FIG. 1.
FIG. 1.

(Color online) Schematic structure of the fabricated MSM PDs.

Image of FIG. 2.
FIG. 2.

(Color online) (a) XRD result of the as-grown and ZnO films on the glass substrates. (b) PL spectrum of the as-grown and ZnO films at room temperature.

Image of FIG. 3.
FIG. 3.

(Color online) FE-SEM images of the as-grown films on the glass substrate: (a) ZnO films and (b) films. The inset shows the EDS spectra of the as-grown films: (c) ZnO and (d) films.

Image of FIG. 4.
FIG. 4.

(Color online) Transmittance spectra of the and ZnO films measured at room temperature. The inset shows the band gaps of the and ZnO films which were determined by extrapolating the squared absorption coefficient and photon energy intercept of the plot.

Image of FIG. 5.
FIG. 5.

(Color online) characteristics of the fabricated MSM PDs with the same Ti/Au interdigitated electrodes. (a) The curves of the Ti/Au contacts to and ZnO films. (b) The photo-/dark currents of the and ZnO MSM PDs measured in darkness and under 350 and 380 nm illuminations, respectively.

Image of FIG. 6.
FIG. 6.

(Color online) Spectral responsivities of the Ti/Au contacts to and ZnO MSM PDs at 5 V applied bias. The inset is a microscopic image of the interdigital fingers.


Generic image for table

Summary of photo-/dark current, responsivities, and UV-to-visible rejection ratios of Ti/Au Ohmic contacts to and ZnO film MSM PDs measured at a bias of 5 V.


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Scitation: Ultraviolet photodetectors based on MgZnO thin films