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Direct simulation Monte Carlo study of effects of thermal nonuniformities in electron-beam physical vapor depositiona)
a)This article is based on material presented at the 57th International Symposium of the American Vacuum Society.
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10.1116/1.3592890
/content/avs/journal/jvsta/29/4/10.1116/1.3592890
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/4/10.1116/1.3592890
/content/avs/journal/jvsta/29/4/10.1116/1.3592890
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/content/avs/journal/jvsta/29/4/10.1116/1.3592890
2011-06-10
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Direct simulation Monte Carlo study of effects of thermal nonuniformities in electron-beam physical vapor depositiona)
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/4/10.1116/1.3592890
10.1116/1.3592890
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