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Direct simulation Monte Carlo study of effects of thermal nonuniformities in electron-beam physical vapor depositiona)
a)This article is based on material presented at the 57th International Symposium of the American Vacuum Society.
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10.1116/1.3592890
/content/avs/journal/jvsta/29/4/10.1116/1.3592890
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/4/10.1116/1.3592890

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic of experimental set-up and the computational domain used in the DSMC simulations.

Image of FIG. 2.
FIG. 2.

(Color online) Slit temperature contours for case I(a).

Image of FIG. 3.
FIG. 3.

Slit temperature and saturation number density distribution at Z  =  0 for cases I(a), II(a), and III(a).

Image of FIG. 4.
FIG. 4.

(Color online) Number density and Knudsen number contours for case I(a).

Image of FIG. 5.
FIG. 5.

(Color online) Comparison of number density and Knudsen number contours at the Z  =  0 plane for cases I(a) (———-) and I(b) (–––).

Image of FIG. 6.
FIG. 6.

(Color online) Comparison of number density and Knudsen number contours at the Y  =  0 plane for cases I(a) (———) and I(b) (–––).

Image of FIG. 7.
FIG. 7.

(Color online) Comparison of mass flux at all collector plate locations for cases I(a) and I(b) for a collector plane distance of X  =  0.14 m. (Top-left) Y = 0.0; (top-right)Y = 0.05; (bottom-left)Y = 0.10; (bottom-right)Y = 0.15 m.

Image of FIG. 8.
FIG. 8.

(Color online) Comparison of mass flux at all collector plate locations for cases I(a) and I(c) for a collector plane distance of X  = 0.14 m. (Top-left) Y = 0.0; (top-right)Y = 0.05; (bottom-left)Y = 0.10; (bottom-right)Y = 0.15 m.

Image of FIG. 9.
FIG. 9.

(Color online) Comparison of contours of Knudsen number contours for cases II(a) (———-) and II(b) (–––) in the Z  =  0 and Y  =  0 planes.

Image of FIG. 10.
FIG. 10.

(Color online) Comparison of mass flux at all collector plate locations for cases II(a) and II(b) for a collector plane distance of X  =  0.14 m. (Top-left)Y = 0.0; (top-right)Y = 0.05; (bottom-left)Y = 0.10; (bottom-right)Y = 0.15 m.

Image of FIG. 11.
FIG. 11.

(Color online) Comparison of mass flux at all collector plate locations for cases III(a) and III(b) for a collector plane distance of X  =  0.14 m. (Top-left)Y = 0.0; (top-right)Y = 0.05; (bottom-left)Y = 0.10; (bottom-right)Y = 0.15 m.

Image of FIG. 12.
FIG. 12.

(Color online) Comparison of contours of Knudsen number contours for cases III(a) (———-) and III(b) (–––) in the Z  =  0 and Y  =  0 planes.

Image of FIG. 13.
FIG. 13.

(Color online) Comparison of mass flux at all collector plate locations for cases I(a) and I(b) for a collector plane distance of X  = 0.28 m. (Top-left) Y = 0.0; (top-right) Y = 0.05; (bottom-left) Y = 0.10; (bottom-right) Y = 0.15 m.

Tables

Generic image for table
TABLE I.

Summary of the DSMC simulations.

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/content/avs/journal/jvsta/29/4/10.1116/1.3592890
2011-06-10
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Direct simulation Monte Carlo study of effects of thermal nonuniformities in electron-beam physical vapor depositiona)
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/4/10.1116/1.3592890
10.1116/1.3592890
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