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Size control of nanopores formed on SiO2 glass by swift-heavy-ion irradiation and its application to highly sensitive biomolecular detection
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10.1116/1.3609795
/content/avs/journal/jvsta/29/5/10.1116/1.3609795
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/5/10.1116/1.3609795

Figures

Image of FIG. 1.
FIG. 1.

Surface SEM images of thermally grown SiO2 glass on Si substrates perforated by irradiation of 137 MeV Au ions with a fluence of ∼5 × 109 cm−2, and subsequent etching using HF vapor resulting from a 20% HF solution. The vertical and horizontal axes represent the temperatures of the substrate and HF solution during the etching, respectively.

Image of FIG. 2.
FIG. 2.

Surface SEM images of the perforated sensing plates. The images obtained for plates A–F are shown in (a)–(f), respectively.

Image of FIG. 3.
FIG. 3.

Reflection spectra of the perforated plates. The spectra obtained for plates A–D before (open circles), and after (solid circles) the adsorption of streptavidin are shown in (a)–(d), respectively. The solid curve in each figure shows the fitting result to estimate the thickness, t, of the mixture layer composed of the cylindrical nanopores and remaining SiO2 glass.

Image of FIG. 4.
FIG. 4.

Schematic drawing of the structure showing assumptions used to estimate the thickness, t, of the mixture layer of the cylindrical nanopores and remaining SiO2 glass.

Image of FIG. 5.
FIG. 5.

Dip-angle shift, Δθ d, as a function of the normalized surface area R s. Note that the characters in the figure represent plates A–F shown in Table I.

Image of FIG. 6.
FIG. 6.

Schematic drawing of the structure showing assumptions used to calculate the reflection spectra after the streptavidin adsorption.

Image of FIG. 7.
FIG. 7.

Correlation between the dip-angle shifts, Δθ d, experimentally and theoretically obtained.

Tables

Generic image for table
TABLE I.

Temperatures of plates that underwent etching to obtain nanopores. Diameter, d n, (average ± one standard deviation) and number density, φ n, of nanopores obtained for each sensing plate are also listed. Furthermore, volume fraction, f b, of nanopores in the mixture layer composed of the nanopores and remaining SiO2 glass, average refractive index, n gb, of the layer, and the layer thickness, t, are also listed for each plate.

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/content/avs/journal/jvsta/29/5/10.1116/1.3609795
2011-07-27
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Size control of nanopores formed on SiO2 glass by swift-heavy-ion irradiation and its application to highly sensitive biomolecular detection
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/5/10.1116/1.3609795
10.1116/1.3609795
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