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Formation of tetragonal or monoclinic ZrO2 coatings by oxygen plasma treatment of Zr74.7Cu19.7Nb5.6 glassy thin films
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10.1116/1.3625567
/content/avs/journal/jvsta/29/5/10.1116/1.3625567
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/5/10.1116/1.3625567
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Figures

Image of FIG. 1.
FIG. 1.

(Color online) AFM images of (a) an as-grown sample (z-scale from 0 to 15 nm) and (b) a fully oxidized sample treated by oxygen plasma (z-scale from 0 to 250 nm).

Image of FIG. 2.
FIG. 2.

SEM images of a fully oxidized sample treated with oxygen plasma.

Image of FIG. 3.
FIG. 3.

(Color online) AES depth profiles of the (a) as-grown samples and samples treated by oxygen plasma for (b) 10 sec and (c) 80 sec.

Image of FIG. 4.
FIG. 4.

(Color online) XPS depth profiles of an (a) as-grown sample and (b) a fully oxidized sample treated by oxygen plasma.

Image of FIG. 5.
FIG. 5.

(Color online) High energy resolution XPS spectra of Zr 3d5/2 , of the (a) as-grown sample at the surface (black lines) and in the depth (blue lines), (b) a fully oxidized sample at the surface (green lines) and in the depth (purple lines) and Cu 2p3/2 of the (c) as-grown sample at the surface (green lines) and (d) in the depth (purple lines).

Image of FIG. 6.
FIG. 6.

XRD patterns of (a) as-grown Zr78.3Cu21.7, (b) as-grown Zr74.7Cu19.7Nb5.6, (c) 10s, (d) 20s, (e) 40s, (f) 80s treated Zr74.7Cu19.7Nb5.6 samples.

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/content/avs/journal/jvsta/29/5/10.1116/1.3625567
2011-08-22
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Formation of tetragonal or monoclinic ZrO2 coatings by oxygen plasma treatment of Zr74.7Cu19.7Nb5.6 glassy thin films
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/5/10.1116/1.3625567
10.1116/1.3625567
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