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Dielectric performance of hybrid alumina-silicone nanolaminates synthesized by plasma enhanced chemical vapor deposition
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10.1116/1.3652918
/content/avs/journal/jvsta/29/6/10.1116/1.3652918
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/6/10.1116/1.3652918

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Alumina composition in alumina–silicone nanolaminates as determined by using the EMA model vs the expected composition.

Image of FIG. 2.
FIG. 2.

(Color online) FTIR spectra obtained from alumina–silicone nanolaminates as a function of the percent alumina composition.

Image of FIG. 3.
FIG. 3.

FE-SEM image of alumina (dark)–silicone (light) nanolaminate.

Image of FIG. 4.
FIG. 4.

(Color online) Transmittance of FTO coated glass and alumina–silicone nanolaminate deposited on FTO coated glass as a function of wavelength.

Image of FIG. 5.
FIG. 5.

(Color online) Dielectric constant (κ) as a function of the alumina composition of alumina–silicone nanolaminates.

Image of FIG. 6.
FIG. 6.

(Color online) Leakage current density as a function of the alumina composition of nanolaminates.

Image of FIG. 7.
FIG. 7.

(Color online) Leakage current density of alumina–silicone nanolaminates with 50% alumina composition as a function of dyad thickness.

Image of FIG. 8.
FIG. 8.

Breakdown field at J = 10−7 A/cm2 as a function of alumina layer thickness in nanolaminates. Horizontal lines indicate the performance of homogeneous silicone and alumina.

Tables

Generic image for table
TABLE I.

Summary of hybrid dielectrics: composition, synthesis and performance.

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/content/avs/journal/jvsta/29/6/10.1116/1.3652918
2011-10-21
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dielectric performance of hybrid alumina-silicone nanolaminates synthesized by plasma enhanced chemical vapor deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/29/6/10.1116/1.3652918
10.1116/1.3652918
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