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Volume 30 Number 1 Front cover image - large version

Volume 30, Issue 1, January 2012

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FEATURED ARTICLE
  • Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition
  • Photovoltaics and Energy
  • Plasma Science and Technology
  • Surfaces
  • Vacuum Science and Technology
  • Perspectives
  • Atomic Layer Deposition (ALD)
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Scitation: Journal of Vacuum Science & Technology A - Volume 30 Number 1
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/1
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