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Thermal chemistry of Mn2(CO)10 during deposition of thin manganese films on silicon oxide and on copper surfaces
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10.1116/1.3658373
/content/avs/journal/jvsta/30/1/10.1116/1.3658373
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/1/10.1116/1.3658373
/content/avs/journal/jvsta/30/1/10.1116/1.3658373
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/content/avs/journal/jvsta/30/1/10.1116/1.3658373
2011-11-03
2014-12-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Thermal chemistry of Mn2(CO)10 during deposition of thin manganese films on silicon oxide and on copper surfaces
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/1/10.1116/1.3658373
10.1116/1.3658373
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