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Continuous atomic layer deposition: Explanation for anomalous growth rate effects
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10.1116/1.3662861
/content/avs/journal/jvsta/30/1/10.1116/1.3662861
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/1/10.1116/1.3662861
/content/avs/journal/jvsta/30/1/10.1116/1.3662861
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/content/avs/journal/jvsta/30/1/10.1116/1.3662861
2011-11-29
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Continuous atomic layer deposition: Explanation for anomalous growth rate effects
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/1/10.1116/1.3662861
10.1116/1.3662861
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