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Real-time spectroscopic ellipsometric investigation of adsorption and desorption in atomic layer deposition: A case study for the strontium bis(tri-isopropylcyclopentadienyl)/water process
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10.1116/1.3664757
/content/avs/journal/jvsta/30/1/10.1116/1.3664757
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/1/10.1116/1.3664757
/content/avs/journal/jvsta/30/1/10.1116/1.3664757
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/content/avs/journal/jvsta/30/1/10.1116/1.3664757
2011-12-06
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Real-time spectroscopic ellipsometric investigation of adsorption and desorption in atomic layer deposition: A case study for the strontium bis(tri-isopropylcyclopentadienyl)/water process
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/1/10.1116/1.3664757
10.1116/1.3664757
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