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Real-time spectroscopic ellipsometric investigation of adsorption and desorption in atomic layer deposition: A case study for the strontium bis(tri-isopropylcyclopentadienyl)/water process
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10.1116/1.3664757
/content/avs/journal/jvsta/30/1/10.1116/1.3664757
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/1/10.1116/1.3664757
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Figures

Image of FIG. 1.
FIG. 1.

Schematic representation of the warm wall stainless steel ALD reactor. Sr precursor and oxidizer lines are shown as well as the Ar purge and dry pump lines. The implementation of a spectroscopic ellipsometer is shown with a fixed angle of incidence (68°).

Image of FIG. 2.
FIG. 2.

(Color online) GPC data for the growth of SrO films at deposition temperatures of 150, 250, and 350 °C as a function of feeding time. The Ar purging and evacuation time after each precursor pulse were 120 and 60 s, respectively. H2O feed time was 1 s. The error bars were calculated based on many single-cycle GPC measurements.

Image of FIG. 3.
FIG. 3.

(Color online) (a) GPC as a function of deposition temperature. (b) Apparent thickness change as a function of acquisition time at different deposition temperatures. The Ar purging and evacuation time after every precursor were 120 and 60 s, respectively. H2O feed time was 1 s.

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/content/avs/journal/jvsta/30/1/10.1116/1.3664757
2011-12-06
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Real-time spectroscopic ellipsometric investigation of adsorption and desorption in atomic layer deposition: A case study for the strontium bis(tri-isopropylcyclopentadienyl)/water process
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/1/10.1116/1.3664757
10.1116/1.3664757
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