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Elaboration of high aspect ratio monocrystalline silicon suspended nanobridges by low temperature alkaline treatment of dry etched trenches
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10.1116/1.3665217
/content/avs/journal/jvsta/30/1/10.1116/1.3665217
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/1/10.1116/1.3665217
/content/avs/journal/jvsta/30/1/10.1116/1.3665217
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/content/avs/journal/jvsta/30/1/10.1116/1.3665217
2011-12-02
2014-11-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Elaboration of high aspect ratio monocrystalline silicon suspended nanobridges by low temperature alkaline treatment of dry etched trenches
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/1/10.1116/1.3665217
10.1116/1.3665217
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