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Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NH x radical formation
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10.1116/1.3666034
/content/avs/journal/jvsta/30/1/10.1116/1.3666034
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/1/10.1116/1.3666034
/content/avs/journal/jvsta/30/1/10.1116/1.3666034
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/content/avs/journal/jvsta/30/1/10.1116/1.3666034
2011-12-14
2014-07-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NHx radical formation
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/1/10.1116/1.3666034
10.1116/1.3666034
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