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Thin-film electronics by atomic layer deposition
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10.1116/1.3670748
/content/avs/journal/jvsta/30/1/10.1116/1.3670748
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/1/10.1116/1.3670748
/content/avs/journal/jvsta/30/1/10.1116/1.3670748
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/content/avs/journal/jvsta/30/1/10.1116/1.3670748
2011-12-14
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Thin-film electronics by atomic layer deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/1/10.1116/1.3670748
10.1116/1.3670748
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