Equivalent-circuit model for vacuum ultraviolet irradiation of dielectric films
(Color online) Substrate/photoemission currents during VUV irradiation of dielectrics.
Circuit model for the dielectric and the substrate.
Norton-equivalent circuit of the model.
Reduced-circuit for the dielectric-substrate layer when steady state is achieved during VUV irradiation.
Reduced-circuit for the dielectric-substrate layer after VUV irradiation is turned off.
(Color online) Calculated and experimental substrate/photoemission currents for 500 nm of UV-cured SiCOH deposited on Si during VUV irradiation.
(Color online) Calculated and experimental substrate/photoemission current for 640 nm of as-deposited SiCOH deposited on Si during VUV irradiation.
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