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Effects of showerhead hole structure on the deposition of hydrogenated microcrystalline silicon thin films by vhf PECVD
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10.1116/1.4721287
/content/avs/journal/jvsta/30/4/10.1116/1.4721287
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/4/10.1116/1.4721287
/content/avs/journal/jvsta/30/4/10.1116/1.4721287
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/content/avs/journal/jvsta/30/4/10.1116/1.4721287
2012-05-24
2014-07-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of showerhead hole structure on the deposition of hydrogenated microcrystalline silicon thin films by vhf PECVD
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/4/10.1116/1.4721287
10.1116/1.4721287
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