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Mutually beneficial doping of tellurium and nitrogen in ZnO films grown by metal-organic chemical vapor deposition
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10.1116/1.4738949
/content/avs/journal/jvsta/30/5/10.1116/1.4738949
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/5/10.1116/1.4738949
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) XRD θ – 2θ patterns of (a) as-grown samples; (b) post-RTA samples.

Image of FIG. 2.
FIG. 2.

(Color online) XPS of (a) Te 3d for the as-grown and post-RTA sample D; (b) N 1s lines for the post-RTA sample D and a N monodoped ZnO sample.

Image of FIG. 3.
FIG. 3.

(Color online) Raman spectra of all as-grown samples at room temperature. The inset shows the intensity of the ZnTe nLO mode (n = 1, 2, and 3) of all samples.

Image of FIG. 4.
FIG. 4.

(Color online) AFM images of (a) a N monodoped ZnO; (b) a Te monodoped ZnO (sample A); (c) a Te-N codoped ZnO (sample B).

Image of FIG. 5.
FIG. 5.

(Color online) C-V curves of all Te-N codoped samples after RTA. The insets show the derived N A values for each sample (top right) and a C-V curve of an n-type ZnO wafer (bottom right), respectively.

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/content/avs/journal/jvsta/30/5/10.1116/1.4738949
2012-07-23
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Mutually beneficial doping of tellurium and nitrogen in ZnO films grown by metal-organic chemical vapor deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/5/10.1116/1.4738949
10.1116/1.4738949
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