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Tetragonal or monoclinic ZrO2 thin films from Zr-based glassy templates
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10.1116/1.4742258
/content/avs/journal/jvsta/30/5/10.1116/1.4742258
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/5/10.1116/1.4742258

Figures

Image of FIG. 1.
FIG. 1.

Representative AFM image of the as-grown Zr-based MG films.

Image of FIG. 2.
FIG. 2.

GID diffractograms of as-grown (a) Zr78Cu22, (b) Zr74Cu21Al5, (c)Zr76Cu15Ti9, (d) Zr73Cu21Si6, and (e) Zr62Cu23Ti9Si6 metallic glassy films.

Image of FIG. 3.
FIG. 3.

(Color online) AES depth profiles of as-grown (a) Zr78Cu22, (b)Zr74Cu21Al5, (c) Zr76Cu15Ti9, (d) Zr73Cu21Si6, and (e) Zr62Cu23Ti9Si6 metallic glassy films.

Image of FIG. 4.
FIG. 4.

(Color online) AES depth profiles of oxidized (a) Zr78Cu22, (b) Zr74Cu21Al5, (c) Zr76Cu15Ti9, (d) Zr73Cu21Si6, and (e) Zr62Cu23Ti9Si6 metallic glassy films.

Image of FIG. 5.
FIG. 5.

(Color online) GID diffractograms of ZrO2 formed by 10 and 20 sec of oxygen plasma treatment of Zr-based metallic glassy films; (a) Zr78Cu22, (b) Zr74Cu21Al5, (c) Zr76Cu15Ti9, (d) Zr73Cu21Si6, and (e) Zr62Cu23Ti9Si6.

Image of FIG. 6.
FIG. 6.

Surface morphologies of ZrO2 formed using as templates the metallic glassy films; (a) Zr78Cu22, (b) Zr74Cu21Al5, (c) Zr76Cu15Ti9, (d) Zr73Cu21Si6 for 20 s, (e) Zr62Cu23Ti9Si6 for 16 s, and (f) Zr62Cu23Ti9Si6 for 20 s oxygen plasma treatment.

Tables

Generic image for table
TABLE I.

Grain sizes of ZrO2 in monoclinic and tetragonal phases for the various systems studied for the different plasma treatment times.

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/content/avs/journal/jvsta/30/5/10.1116/1.4742258
2012-07-31
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Tetragonal or monoclinic ZrO2 thin films from Zr-based glassy templates
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/5/10.1116/1.4742258
10.1116/1.4742258
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