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Mechanically robust silica-like coatings deposited by microwave plasmas for barrier applications
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10.1116/1.4748804
/content/avs/journal/jvsta/30/6/10.1116/1.4748804
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/6/10.1116/1.4748804
/content/avs/journal/jvsta/30/6/10.1116/1.4748804
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/content/avs/journal/jvsta/30/6/10.1116/1.4748804
2012-08-29
2014-08-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Mechanically robust silica-like coatings deposited by microwave plasmas for barrier applications
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/6/10.1116/1.4748804
10.1116/1.4748804
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