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Long-term stability of metal-envelope enclosed Bayard–Alpert ionization gauges
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10.1116/1.4750482
/content/avs/journal/jvsta/30/6/10.1116/1.4750482
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/6/10.1116/1.4750482

Figures

Image of FIG. 1.
FIG. 1.

Example of low-range calibration data. The dark circles are the measured FCF , the solid line represents a polynomial function fCF fit to the data, and the dashed lines represent the expanded uncertainty interval (k = 2).

Image of FIG. 2.
FIG. 2.

Relative change in calibration factors since the first calibration as a function of time. Graphs (a) through (f) represent the relative change in the low-range calibration factors determined at six different gauge pressures: (a) 6.7 × 10−7 Pa, (b) 6.7 × 10−6 Pa, (c) 6.7 × 10−5 Pa, (d) 6.7 × 10−4 Pa, (e) 6.7 × 10−3 Pa, and (f) 1.3 × 10−2 Pa.

Image of FIG. 3.
FIG. 3.

Fractional change in calibration factors relative to the average calibration factor for each gauge, , as a function of the calibration cycle. Each calibration cycle is separated from the previous calibration by more than one year. Graphs (a) through (f) represent the fractional change in the low-range calibration factors determined at six different gauge pressures: (a) 6.7 × 10−7 Pa, (b) 6.7 × 10−6 Pa, (c) 6.7 × 10−5 Pa, (d) 6.7 × 10−4 Pa, (e) 6.7 × 10−3 Pa, and (f) 1.3 × 10−2 Pa.

Image of FIG. 4.
FIG. 4.

Plot of spooled as a function of pressure for the low-range. spooled is a measurement of long-term stability since .

Tables

Generic image for table
TABLE I.

Relative standard uncertainty in fCF for a typical MEG calibration. The type A uncertainty uA is taken from the standard uncertainty of a polynomial fit to the FCF evaluated at the relevant pressures and the type B uncertainty uB represents all of the other uncertainty contributions to PSTD .

Generic image for table
TABLE II.

Calibration history for the nine gauges included in the low-range LTS study. The letters A through E correspond to the five different customers of the calibration service who own the gauges. Gauges with a 1.02 mm diameter collector are designated by EXT (extended pressure range), whereas UHV designates gauges with a 0.13 mm diameter collector, optimized for ultra-high vacuum measurements. The total number of calibrations is 28.

Generic image for table
TABLE III.

Calibration history for the seven gauges included in the high-range LTS study. The letters A, B, C, and E correspond to the four different customers of the calibration service who own the gauges. Gauges with a 1.02 mm diameter collector are designated by EXT (extended pressure range), whereas UHV designates gauges with a 0.13 mm diameter collector, optimized for ultra-high vacuum measurements. The total number of calibrations is 21.

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/content/avs/journal/jvsta/30/6/10.1116/1.4750482
2012-09-12
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Long-term stability of metal-envelope enclosed Bayard–Alpert ionization gauges
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/6/10.1116/1.4750482
10.1116/1.4750482
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