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Study on the oxidation and reduction of tungsten surface for sub-50 nm patterning process
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10.1116/1.4758790
/content/avs/journal/jvsta/30/6/10.1116/1.4758790
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/6/10.1116/1.4758790
/content/avs/journal/jvsta/30/6/10.1116/1.4758790
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/content/avs/journal/jvsta/30/6/10.1116/1.4758790
2012-10-19
2014-11-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Study on the oxidation and reduction of tungsten surface for sub-50 nm patterning process
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/30/6/10.1116/1.4758790
10.1116/1.4758790
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