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Interface layer in hafnia/Si films as a function of ALD cycles
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10.1116/1.4747324
/content/avs/journal/jvsta/31/1/10.1116/1.4747324
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/1/10.1116/1.4747324
/content/avs/journal/jvsta/31/1/10.1116/1.4747324
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/content/avs/journal/jvsta/31/1/10.1116/1.4747324
2012-08-22
2014-10-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Interface layer in hafnia/Si films as a function of ALD cycles
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/1/10.1116/1.4747324
10.1116/1.4747324
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