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Atomic layer deposition of epitaxial TiO2 II on c-sapphire
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10.1116/1.4764892
/content/avs/journal/jvsta/31/1/10.1116/1.4764892
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/1/10.1116/1.4764892

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Raman spectra of 50–60 nm thick TiO2 films grown in reactor 1 at different temperatures (a) and of 6.5–146 nm thick films grown in reactor 2 at 500 °C (b). Bold ticks at the horizontal axes indicate the positions of TiO2 II peaks measured by Mammone et al. (Refs. 34 and 35 ).

Image of FIG. 2.
FIG. 2.

(Color online) Raman spectra of TiO2 films grown in reactor 1 at 500 °C (upper pair) and 425 °C (lower pair) according as whether the TiCl4 pulse length x 1 was 0.5 or 2 s.

Image of FIG. 3.
FIG. 3.

(Color online) XRD θ−2θ scans of 50–60 nm thick TiO2 films grown in reactor 1 at different temperatures. Bold ticks at the horizontal axis indicate 2θ angles of anatase, rutile, phase II, and sapphire reflections taken from the databases referred to in the text. Note the interference fringes accompanying R/II 2 0 0 and R/II 4 0 0 reflections in the films grown at 475–500 °C. The fringes prove good crystalline quality of the films.

Image of FIG. 4.
FIG. 4.

(Color online) Growth temperature dependences of the 2θ value of the XRD R/II 4 0 0 reflection (see Fig. 3 ) and full widths at half maximum of this reflection and its RCs.

Image of FIG. 5.
FIG. 5.

(Color online) XRD φ-scans of a 50 nm thick TiO2 film grown in reactor 1 at 600 °C. Indicated are the corresponding reflection planes.

Image of FIG. 6.
FIG. 6.

(Color online) Reciprocal space maps of a 150 nm thick TiO2 film grown in reactor 2 at 600 °C. Indicated are the 2θ reflection planes, the interplane spacings d determined for the centers of these reflections, and the angles and the number of φ-reflections.

Tables

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TABLE I.

TiO2 polymorphs.

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/content/avs/journal/jvsta/31/1/10.1116/1.4764892
2012-11-07
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Atomic layer deposition of epitaxial TiO2 II on c-sapphire
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/1/10.1116/1.4764892
10.1116/1.4764892
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