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Modeling of inductively coupled plasma Ar/Cl2/N2 plasma discharge: Effect of N2 on the plasma properties
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10.1116/1.4766681
/content/avs/journal/jvsta/31/1/10.1116/1.4766681
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/1/10.1116/1.4766681

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Electron density n e vs %N2: comparisons between the simulations and the experiments (Ref. 39 ).

Image of FIG. 2.
FIG. 2.

(Color online) Electron temperature T e vs %N2: comparison between the simulation and the experiment (Ref. 29 ).

Image of FIG. 3.
FIG. 3.

(Color online) Electron density n e evolution vs %N2 for different pressure values.

Image of FIG. 4.
FIG. 4.

(Color online) T e evolution vs %N2 for different pressure values.

Image of FIG. 5.
FIG. 5.

(Color online) Electronegativity g vs %N2 for different pressure values.

Image of FIG. 6.
FIG. 6.

(Color online) Charged species density variation with %N2 at p = 5 mTorr.

Image of FIG. 7.
FIG. 7.

Evolution of dissociative attachment rate coefficient k 5 vs T e at p = 1 mTorr.

Image of FIG. 8.
FIG. 8.

(Color online) Dissociation rate of Cl2 and N2 vs %N2.

Image of FIG. 9.
FIG. 9.

Dissociation frequency of Cl2 vs T e at p = 1 mTorr.

Image of FIG. 10.
FIG. 10.

Dissociation frequency of N2 vs T e at p = 1 mTorr.

Image of FIG. 11.
FIG. 11.

(Color online) Density variation of excited species vs %N2 at p = 1 mTorr.

Image of FIG. 12.
FIG. 12.

(Color online) Density variation of different excitation levels of nitrogen vs %N2 at p = 1 mTorr.

Image of FIG. 13.
FIG. 13.

(Color online) Neutral density variation with %N2 at p = 1 mTorr.

Image of FIG. 14.
FIG. 14.

(Color online) Density variations of excitation levels of argon vs %N2 at p = 1 mTorr.

Image of FIG. 15.
FIG. 15.

variation vs %N2 at p = 1 mTorr.

Image of FIG. 16.
FIG. 16.

variation vs %N2 at p = 1 mTorr.

Tables

Generic image for table
TABLE I.

Surface reactions on the wall.

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TABLE II.

Different species taken into account in the Cl2/Ar/N2 plasma model, beside electrons.

Generic image for table
TABLE III.

Chlorine reaction scheme.

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TABLE IV.

Argon reaction scheme.

Generic image for table
TABLE V.

Nitrogen reaction scheme.

Generic image for table
TABLE VI.

Radiative deexcitation reaction scheme.

Generic image for table
TABLE VII.

Neutral/neutral and ion/neutral reaction scheme.

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/content/avs/journal/jvsta/31/1/10.1116/1.4766681
2012-11-27
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Modeling of inductively coupled plasma Ar/Cl2/N2 plasma discharge: Effect of N2 on the plasma properties
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/1/10.1116/1.4766681
10.1116/1.4766681
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