Schematic diagram of the in situ hydrogen plasma process during ZnO deposition.
Resistivity of the ZnO thin films deposited as functions of the hydrogen plasma (a) power and (b) exposure time.
Electrical properties (carrier concentration and hall mobility) of the ZnO thin films deposited as a function of hydrogen plasma (a) power and (b) exposure time.
(Color online) XRD patterns obtained from the ZnO thin films deposited with hydrogen plasma at different plasma (a) powers and (b) times.
(Color online) O1s XPS peaks of ZnO film with a hydrogen plasma power of (a) 0 W, (b) 50 W, (c) 100 W, and (d) 200 W.
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