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Low-temperature atomic layer deposition of Al2O3 on blown polyethylene films with plasma-treated surfaces
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10.1116/1.4768171
/content/avs/journal/jvsta/31/1/10.1116/1.4768171
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/1/10.1116/1.4768171

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Experimental set up and ALD process for Al2O3 deposition on HDPE films. (a) Installation of PE specimens for depositing Al2O3 on the HDPE films. (b) Schematics of the ALD process for depositing Al2O3 thin films on HDPE films.

Image of FIG. 2.
FIG. 2.

SEM images showing the surface morphologies of an Al2O3-coated polyethylene blown film with various carrier gas flows. (a) A nitrogen gas flow at 30 sccm. (b) A nitrogen gas flow at 200 sccm.

Image of FIG. 3.
FIG. 3.

(Color online) Variations in the contact angle of a polyethylene blown film as a function of the duration of the plasma treatment.

Image of FIG. 4.
FIG. 4.

(Color online) C1s and O1s core level spectra for a plasma-treated polyethylene blown film and the plasma-treatment durations. The concentration ratio of carbon decreased linearly with an increase in the plasma-treatment duration. The concentration ratio of oxygen, on the other hand, increased linearly with an increase in the plasma-treatment duration. (a) C1s concentration rate. (b) O1s concentration rate.

Image of FIG. 5.
FIG. 5.

(Color online) Growth rate as a function of the plasma effect. The growth rate is constant at 1 Å/cycle during the ALD process after a pulsing time 0.5 s. The growth rate for untreated polymers is greater than that for plasma-treated polymers because the precursor is randomly deposited in the near-surface region of the polymer during the initial stage of the ALD process.

Image of FIG. 6.
FIG. 6.

SEM images showing the surface morphologies of an Al2O3-coated polyethylene blown film. (a) Surface of a polyethylene blown film before the ALD process. (b) Surface of plasma-treated polyethylene blown film before the ALD process. (c) Al2O3 thin film deposited on an untreated polyethylene film. (d) Al2O3 thin film deposited on a plasma-treated polyethylene blown film.

Image of FIG. 7.
FIG. 7.

(Color online) EDX spectra of Al2O3 thin films deposited on polyethylene blown films. The results show that the alumina was detected in the plasma-treated and untreated polymers and that the uncoated polyethylene blown film contained both carbon and oxygen. (a) Components of each samples. (b) Alumina component of each samples.

Image of FIG. 8.
FIG. 8.

(Color online) Image of a cross section of an Al2O3 thin film deposited on a polyethylene blown film. The image was obtained by the FIB technique. The Al2O3 thin films were deposited uniformly on the plasma-treated and untreated polymer surfaces. (a) Cross section of Al2O3 coated polymer film without plasma treatment. (b) Cross section of Al2O3 coated polymer film with plasma treatment.

Image of FIG. 9.
FIG. 9.

(Color online) AFM images of both pure polymer film and Al2O3 coated polymer film and RMS roughness value. (a) Surface morphology of pure polymer film. (b) Surface morphology of Al2O3 coated polymer film. (c) The RMS surface roughness (Rq) of these samples was found to be 73.3 nm and 67.14 nm, respectively.

Tables

Generic image for table
TABLE I.

Key physical properties of high-density polyethylene.

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/content/avs/journal/jvsta/31/1/10.1116/1.4768171
2012-11-27
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low-temperature atomic layer deposition of Al2O3 on blown polyethylene films with plasma-treated surfaces
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/1/10.1116/1.4768171
10.1116/1.4768171
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