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Preparation and phase structures of Zn–Ti–O ternary compounds by atomic layer deposition
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10.1116/1.4769451
/content/avs/journal/jvsta/31/1/10.1116/1.4769451
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/1/10.1116/1.4769451
/content/avs/journal/jvsta/31/1/10.1116/1.4769451
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/content/avs/journal/jvsta/31/1/10.1116/1.4769451
2012-11-30
2014-10-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Preparation and phase structures of Zn–Ti–O ternary compounds by atomic layer deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/1/10.1116/1.4769451
10.1116/1.4769451
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