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Atomic layer deposition of TiN for the fabrication of nanomechanical resonators
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10.1116/1.4790132
/content/avs/journal/jvsta/31/2/10.1116/1.4790132
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/2/10.1116/1.4790132
/content/avs/journal/jvsta/31/2/10.1116/1.4790132
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/content/avs/journal/jvsta/31/2/10.1116/1.4790132
2013-02-05
2015-03-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Atomic layer deposition of TiN for the fabrication of nanomechanical resonators
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/2/10.1116/1.4790132
10.1116/1.4790132
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