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Low ion energy RF reactor using an array of plasmas through a grounded grid
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10.1116/1.4790423
/content/avs/journal/jvsta/31/2/10.1116/1.4790423
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/2/10.1116/1.4790423
/content/avs/journal/jvsta/31/2/10.1116/1.4790423
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/content/avs/journal/jvsta/31/2/10.1116/1.4790423
2013-02-06
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low ion energy RF reactor using an array of plasmas through a grounded grid
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/2/10.1116/1.4790423
10.1116/1.4790423
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