(Color online) (a) Topography map of a sputter crater on polystyrene obtained by white-light profilometry. (b) Linescan showing step-heights representative of crater depth.
GCIB sputter depth profile of FMOC/Irganox 1010 reference material under the same instrumental conditions (cluster ion energy 4000 eV, cluster ion size around 1000 atoms) as for the other polymer measurements in this work.
Measured sputter rate relative to Irganox 1010 for 19 polymers for Ar cluster ions of energy 4000 eV and a typical cluster size of 1000 atoms.
Measured sputter rate ratio for PMMA to PEEK, PET, and PP at three values of energy-per-atom of incident argon cluster ions.
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