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Material dependence of argon cluster ion sputter yield in polymers: Method and measurements of relative sputter yields for 19 polymersa)
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10.1116/1.4791669
/content/avs/journal/jvsta/31/2/10.1116/1.4791669
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/2/10.1116/1.4791669

Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) Topography map of a sputter crater on polystyrene obtained by white-light profilometry. (b) Linescan showing step-heights representative of crater depth.

Image of FIG. 2.
FIG. 2.

GCIB sputter depth profile of FMOC/Irganox 1010 reference material under the same instrumental conditions (cluster ion energy 4000 eV, cluster ion size around 1000 atoms) as for the other polymer measurements in this work.

Tables

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TABLE I.

Measured sputter rate relative to Irganox 1010 for 19 polymers for Ar cluster ions of energy 4000 eV and a typical cluster size of 1000 atoms.

Generic image for table
TABLE II.

Measured sputter rate ratio for PMMA to PEEK, PET, and PP at three values of energy-per-atom of incident argon cluster ions.

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/content/avs/journal/jvsta/31/2/10.1116/1.4791669
2013-02-11
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Material dependence of argon cluster ion sputter yield in polymers: Method and measurements of relative sputter yields for 19 polymersa)
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/2/10.1116/1.4791669
10.1116/1.4791669
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