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Characterization of metal oxide layers grown on CVD graphene
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10.1116/1.4792068
/content/avs/journal/jvsta/31/2/10.1116/1.4792068
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/2/10.1116/1.4792068
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) AFM images of the samples with 0.5 nm aluminum deposited on various thickness of titanium seed layers on CVD grown graphene.

Image of FIG. 2.
FIG. 2.

(Color online) AFM images of the samples with 1.0 nm aluminum deposited on various thickness of titanium seed layers on CVD grown graphene.

Image of FIG. 3.
FIG. 3.

(Color online) AFM images of the samples with 1.5 nm aluminum deposited on various thickness of titanium seed layers on CVD grown graphene.

Image of FIG. 4.
FIG. 4.

(Color online) AFM images of the samples with 2.0 nm aluminum deposited on various thickness of titanium seed layers on CVD grown graphene.

Image of FIG. 5.
FIG. 5.

(Color online) AFM images of the samples with 3.0 nm aluminum deposited on various thickness of titanium seed layers on CVD grown graphene.

Image of FIG. 6.
FIG. 6.

(Color online) RMS surface roughness of samples with five different thickness of aluminum layers deposited on various thickness of titanium seed layers. Dotted line indicates the measured RMS surface roughness of an HOPG standard sample.

Image of FIG. 7.
FIG. 7.

(Color online) Al 2p x-ray photoelectron peaks of 1.0 nm Al on 0.0, 0.2, and 1.0 nm titanium seed layer samples. The dotted line at 73.65 eV is the binding energy associated with Al2O3-2p (Ref. 23 ) and the dotted line at 72.72 eV is the binding energy associated with Al-2p (metallic Al) (Ref. 23 ).

Image of FIG. 8.
FIG. 8.

(Color online) Al 2p x-ray photoelectron peaks of 1.5 nm Al on 0.0, 0.2, and 1.0 nm titanium seed layer samples. The dotted line at 73.65 eV is the binding energy associated with Al2O3-2p (Ref. 23 ) and the dotted lineat 72.72 eV is the binding energy associated with Al-2p (metallic Al) (Ref. 23 ).

Image of FIG. 9.
FIG. 9.

(Color online) Al 2p x-ray photoelectron peaks of 2.0 nm Al on 0.0, 0.2, and 1.0 nm titanium seed layer samples. The dotted line at 73.65 eV is the binding energy associated with Al2O3-2p (Ref. 23 ) and the dotted lineat 72.72 eV is the binding energy associated with Al-2p (metallic Al) (Ref. 23 ).

Image of FIG. 10.
FIG. 10.

(Color online) Ti 2p x-ray photoelectron peaks 1.0 nm Al on 0.0, 0.2, and 1.0 nm titanium seed layer samples. The de-convolved peaks are labeled as TiO2-2p3∕2, TiO2-2p1∕2, TiO x -2p3∕2, TiO x -2p1∕2, Ti-2p3∕2, and Ti-2p1∕2 (Refs. 24 and 25 ).

Image of FIG. 11.
FIG. 11.

(Color online) Ti 2p x-ray photoelectron peaks 1.5 nm Al on 0.0, 0.2, and 1.0 nm titanium seed layer samples. The de-convolved peaks are labeled as TiO2-2p3∕2, TiO2-2p1∕2, TiO x -2p3∕2, TiO x -2p1∕2, Ti-2p3∕2, and Ti-2p1∕2 (Refs. 24 and 25 ).

Image of FIG. 12.
FIG. 12.

(Color online) Ti 2p x-ray photoelectron peaks 2.0 nm Al on 0.0, 0.2, and 1.0 nm titanium seed layer samples. The de-convolved peaks are labeled as TiO2-2p3∕2, TiO2-2p1∕2, TiO x -2p3∕2, TiO x -2p1∕2, Ti-2p3∕2, and Ti-2p1∕2 (Refs. 24 and 25 ).

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/content/avs/journal/jvsta/31/2/10.1116/1.4792068
2013-02-14
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Characterization of metal oxide layers grown on CVD graphene
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/2/10.1116/1.4792068
10.1116/1.4792068
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