1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Nanoscale topographic pattern formation on Kr+-bombarded germanium surfaces
Rent:
Rent this article for
USD
10.1116/1.4792152
/content/avs/journal/jvsta/31/2/10.1116/1.4792152
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/2/10.1116/1.4792152

Figures

Image of FIG. 1.
FIG. 1.

(Color online) AFM images of Ge samples in the various morphological regimes. Samples were irradiated with different ion incidence angles at 250 eV at fluences of 4.5 × 1018 ions/cm2 reckoned in a plane perpendicular to the ion beam. The projected ion beam direction is from the bottom to the top of the page. Scale bar lengths are 200 nm for AFM images, and 100 μm−1 for the FFT inset. Ion incidence angles, resulting surface morphologies, and height scales are (a) 5°, smooth, 1 nm, (b) 60°, parallel-mode ripples, 6 nm, (c) 75°, holes, 4 nm, and (d) 80°, perpendicular-mode ripples, 2 nm. Inset: FFT of image D, showing the emergence of perpendicular-mode ripples.

Image of FIG. 2.
FIG. 2.

(Color online) Pattern formation phase diagram. Qualitative patterning behavior is equivalent for both 250 and 500 eV ion energy. Filled circles: smoothening; open circles: parallel-mode ripples; crosses: perpendicular-mode ripples. Superposed circles and crosses indicate a hole pattern, which we interpret as the superposition of parallel- and perpendicular-mode ripples.

Tables

Generic image for table
TABLE I.

Wavelengths of pattern formation in linear regime, as measured with FFT.

Loading

Article metrics loading...

/content/avs/journal/jvsta/31/2/10.1116/1.4792152
2013-02-19
2014-04-18
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nanoscale topographic pattern formation on Kr+-bombarded germanium surfaces
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/2/10.1116/1.4792152
10.1116/1.4792152
SEARCH_EXPAND_ITEM