1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Noninvasive, real-time measurements of plasma parameters via optical emission spectroscopy
Rent:
Rent this article for
USD
10.1116/1.4792671
/content/avs/journal/jvsta/31/2/10.1116/1.4792671
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/2/10.1116/1.4792671

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Processing of OES measurements (wavelengths in nanometers) into desired plasma parameters. A dashed line indicates that the analysis is only weakly dependent on the quantity.

Image of FIG. 2.
FIG. 2.

(Color online) Apparatus for real-time OES measurements.

Image of FIG. 3.
FIG. 3.

Trapezoid background subtraction with correction for residual Ar emissions at edges of the region of interest.

Image of FIG. 4.
FIG. 4.

Contour plot of surface for OES-BF extraction of metastable 1s5 and resonance 1s4 number densities. Darker shades of gray correspond to smaller values of . Best fit values of and .

Image of FIG. 5.
FIG. 5.

(Color online) Comparison of number densities measured by OES-BF technique (open points) using low-resolution spectrometer and white-light OAS (solid points) in 15 mTorr Ar/H2 (a) and Ar/O2 (b) mixtures.

Image of FIG. 6.
FIG. 6.

(Color online) Real-time spectroscopic measurements for 600 W Ar ICP (lines). Points represent values obtained by Langmuir probe ( , c: ne ) and OAS (d: 1s5 and 1s4 number densities) made under static conditions at fixed values of the pressure.

Image of FIG. 7.
FIG. 7.

(Color online) Real-time spectroscopic measurements for 15 mTorr Ar ICP as a function of rf power(lines). Points represent values obtained by Langmuir probe ( , c: ne ) and OAS (d: 1s5 and 1s4 number densities) made under static conditions at fixed power levels.

Image of FIG. 8.
FIG. 8.

Plasma emission spectra (15 mTorr, 600 W ICP) recorded with Verity SD1024FH spectrometer. Vertical dashed lines denote locations of Ar peaks used to determine number densities (nm ), and the electron temperature ( ).

Image of FIG. 9.
FIG. 9.

(Color online) Real-time spectroscopic measurements for 15 mTorr, 600 W Ar/N2 ICP (lines). Points represent values obtained by Langmuir probe ( , c: ne ) and OAS (d: 1s5 and 1s4 number densities) made under static conditions at fixed values of the N2 admixture.

Image of FIG. 10.
FIG. 10.

(Color online) Real-time spectroscopic measurements for 15 mTorr, 600 W Ar/O2 ICP (lines). Points represent values obtained by Langmuir probe ( , c: ne ) and OAS (d: 1s5 and 1s4 number densities) made under static conditions at fixed values of the O2 admixture.

Image of FIG. 11.
FIG. 11.

(Color online) Real-time spectroscopic measurements for 2.5 mTorr, 600 W Ar/H2 ICP (lines). Points represent values obtained by Langmuir probe ( , c: ne ) and OAS (d: 1s5 and 1s4 number densities) made under static conditions at fixed values of the H2 admixture.

Tables

Generic image for table
TABLE I.

Argon emission lines used in real-time OES analysis.

Generic image for table
TABLE II.

Comparison of EEDF parameters derived from real-time OES measurements and Langmuir probe in a 600 W pure argon ICP.

Generic image for table
TABLE III.

Reabsorption coefficients [Eq. (A5) ] for emission lines used in OES-BF analysis. Transition probabilities from Ref. 21 . As described in Sec. II A , the three densities are recast into two effective densities, with , and .

Generic image for table
TABLE IV.

Excitation rates for Ar lines used in effective electron temperature determination expressed in terms of the parameters in Eq. (B2) .

Loading

Article metrics loading...

/content/avs/journal/jvsta/31/2/10.1116/1.4792671
2013-02-22
2014-04-18
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Noninvasive, real-time measurements of plasma parameters via optical emission spectroscopy
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/2/10.1116/1.4792671
10.1116/1.4792671
SEARCH_EXPAND_ITEM