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Validity of automated x-ray photoelectron spectroscopy algorithm to determine the amount of substance and the depth distribution of atoms
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10.1116/1.4795246
/content/avs/journal/jvsta/31/3/10.1116/1.4795246
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/3/10.1116/1.4795246

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Definition of quantities used in the algorithm.

Image of FIG. 2.
FIG. 2.

(Color online) values resulting from analysis of Au4d spectra from overlayers of varying thickness d on a substrate. Also shown is the true .

Image of FIG. 3.
FIG. 3.

(Color online) As Fig. 2 but for an Au substrate with an overlayer of increasing thickness d.

Image of FIG. 4.
FIG. 4.

(Color online) As Fig. 2 but for an Au layer of 5 Å thickness placed at varying distance d underneath the surface.

Image of FIG. 5.
FIG. 5.

(Color online) values resulting from analysis of Au4d spectra from overlayers of varying thickness d on a substrate.

Image of FIG. 6.
FIG. 6.

(Color online) As Fig. 5 but for substrate with an overlayer of increasing thickness d.

Image of FIG. 7.
FIG. 7.

(Color online) As Fig. 5 but for a layer of 5 Å thickness placed at varying distance d underneath the surface.

Image of FIG. 8.
FIG. 8.

(Color online) As Figs. 2–4 but for different values of  = 20 eV, 30 eV, and 40 eV.

Image of FIG. 9.
FIG. 9.

(Color online) As Figs. 5–7 but for different values of  = 20 eV, 30 eV, and 40 eV.

Tables

Generic image for table
TABLE I.

Rules to estimate the depth distribution of atoms from L.

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/content/avs/journal/jvsta/31/3/10.1116/1.4795246
2013-03-14
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Validity of automated x-ray photoelectron spectroscopy algorithm to determine the amount of substance and the depth distribution of atoms
http://aip.metastore.ingenta.com/content/avs/journal/jvsta/31/3/10.1116/1.4795246
10.1116/1.4795246
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