(Color online) HRXRD pattern of SZTO films depending on Si concentration.
(Color online) (a) Carrier concentration and resistivity of the SZTO films as a function of Si concentration and (b) optical transmittance of SZTO films as a function of Si content and (inset) plots of (αhν)2, extracted from (b).
(Color online) Transfer characteristics of SZTO TFTs as a function of Si concentration.
(Color online) XPS spectra of SZTO films (a) Zn 2p3/2 and (b) Sn 3d5/2 peak and O 1s in case of the mole ratio of Si:Zn:Sn was (c) 0:1:1 and (d) 0.02:1:1.
Calculated electrical properties of SZTO TFTs from saturation region.
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